The Division of Silicon Microsystem and Nanostructure Technology is located in Piaseczno near Warsaw. The division’s activity is focused on research and development (R&D) in the field of microtechnology based on silicon technology and covers a wide range of topics: silicon photodiodes and ionizing radiation detectors, thermal conductive detectors (TCD), micromechanical sensors using the phenomenon of mechanical resonance, microfluidic structures and micro-assembly techniques.
A team of scientists, engineers and skilled technicians implements R&D projects starting from a concept development, through multimodal computer simulations, selection of optimal materials and proper technology, up to prototype stage of a specialized device. R&D projects and low volume production are carried out in a cleanroom (class ISO 4–6) equipped with a complete set of tools enabling the production of micro- and nano-devices using CMOS/MEMS-based technology.
A flexible approach, a wide range of processes and a relatively low cost of process runs make the Łukasiewicz-ITE Division in Piaseczno an ideal place for the fabrication of specialized microsystems and detectors unavailable on the market. The carried out projects are financed both from public funds (NCBiR, NCN and EU programs) as well as commercial sources (direct orders from enterprises). In 2019 four major international projects with Lars Lightning, P.P.U., Medbryt, Automatix, STMicroelectronics (Italy), and the National Institute for Research and Development in Microtechnologies (Romania) were carried out. There were also services provided for companies such as Weles Acoustics Sp. z o.o., Centrum Rozwojowo-Wdrożeniowe Telesystem Mesko, Elektrometal SA, PIK Instruments, Przedsiębiorstwo Projektowo-Wdrożeniowe AWAT, SIRC Sp. z o.o., Vigo System S.A, PORT Polish Center for Technology Development and EXXELIA SAS (France) as well as for research universities e.g. Łódz University of Technology, Military University of Technology in Warsaw, University of Adam Mickiewicz University in Poznań, AGH University of Science and Technology in Kraków, Wrocław University of Technology and Sapienza University in Rome.
