The Institute of Electron Technology (ITE) was established in 1966 by the Council of Ministers within the Polish Academy of Sciences in Warsaw. The main objectives of its scientific activities were basic and applied research in the field of semiconductor electronics and physics.

In 1970, the ITE was transformed into industrial Institute supervised by the Ministry of Industry. ITE became a part of newly created Scientific and Production Centre of Semiconductors CEMI. The additional objectives were then to develop new semiconductor devices and technologies, transfer them into mass production at semiconductor factory and supervise their production.

ITE left CEMI Centre in 1991 becoming again an independent R&D organization under the Ministry of Economy with main focus on conducting scientific research at a level recognized by the international community and developing advanced semiconductor technologies for innovative products.

In 2000, silicon processing pilot line started its activity within new ITE laboratory at Piaseczno near Warsaw.

Due to decision of Ministry of Economy, the Research and Development Centre for Hybrid Microelectronics and Resistors located in Kraków was incorporated into ITE in April 2002.